Ion Implantation Technology-94: Proceedings of the Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994

Ion Implantation Technology-94: Proceedings of the Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994 by Italy) International Conference on Ion Implantation Technology (10th : 1994 : Catania, Giuseppe Ferla, Francesco Priolo, Emanuele Rimini

ISBN10: 0444821945
ISBN13: 978-0444821942
Author: Italy) International Conference on Ion Implantation Technology (10th : 1994 : Catania, Giuseppe Ferla, Francesco Priolo, Emanuele Rimini
Title: Ion Implantation Technology-94: Proceedings of the Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994
Publisher: North-Holland (May 1, 1995)
Language: English
Size ePub: 1345 kb
Size PDF: 1308 kb
Rating: 3.6/5
Votes: 533
Pages:
Subcategory: Engineering

Ion Implantation Technology-94: Proceedings of the Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994 by Italy) International Conference on Ion Implantation Technology (10th : 1994 : Catania, Giuseppe Ferla, Francesco Priolo, Emanuele Rimini



The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters. The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.

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